@incollection{Wendler12, author = {Katharina Lorenz and Elke Wendler}, title = {Implantation Damage Formation in GaN and ZnO}, booktitle = {Ion Implantation}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Mark Goorsky}, chapter = {11}, doi = {10.5772/34751}, url = {https://doi.org/10.5772/34751} }