@incollection{Mikoushkin12,
author = {Valery Mikoushkin},
title = {Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {9},
doi = {10.5772/34863},
url = {https://doi.org/10.5772/34863}
}