@incollection{Privitera12,
author = {Stefania Maria Serena Privitera},
title = {Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {7},
doi = {10.5772/35338},
url = {https://doi.org/10.5772/35338}
}