@incollection{Likhachev12,
author = {Denis Shamiryan and Dmitriy V. Likhachev},
title = {Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {5},
doi = {10.5772/37758},
url = {https://doi.org/10.5772/37758}
}