@incollection{Meijer12,
author = {Sébastien Pezzagna and Jan Meijer},
title = {High-Resolution Ion Implantation from keV to MeV},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {1},
doi = {10.5772/34601},
url = {https://doi.org/10.5772/34601}
}