@incollection{Nishide12,
author = {Hirofumi Shimizu and Toshikazu Nishide},
title = {Characterization of Sol-Gel-Derived and Crystallized HfO2, ZrO2, ZrO2-Y2O3 Thin Films on Si(001) Wafers with High Dielectric Constant},
booktitle = {Advances in Crystallization Processes},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yitzhak Mastai},
chapter = {13},
doi = {10.5772/35727},
url = {https://doi.org/10.5772/35727}
}