@incollection{Eriguchi12,
author = {Koji Eriguchi},
title = {Application of Molecular Dynamics Simulations to Plasma Etch Damage in Advanced Metal-Oxide-Semiconductor Field-Effect Transistors},
booktitle = {Molecular Dynamics},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Lichang Wang},
chapter = {11},
doi = {10.5772/36394},
url = {https://doi.org/10.5772/36394}
}