@incollection{Raynal12, author = {Frederic Raynal}, title = {Integration of Electrografted Layers for the Metallization of Deep Through Silicon Vias}, booktitle = {Electroplating}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Darwin Sebayang and Sulaiman Bin Haji Hasan}, chapter = {4}, doi = {10.5772/33948}, url = {https://doi.org/10.5772/33948} }