@incollection{Shih12,
author = {Hong Shih},
title = {A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication},
booktitle = {Corrosion Resistance},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Hong Shih},
chapter = {1},
doi = {10.5772/31992},
url = {https://doi.org/10.5772/31992}
}