@incollection{Santra12,
author = {T. S. Santra and T. K. Bhattacharyya and P. Patel and F. G. Tseng and T. K. Barik},
title = {Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {18},
doi = {10.5772/29671},
url = {https://doi.org/10.5772/29671}
}