@incollection{Jahed12,
author = {Arash Tajik and Hamid Jahed},
title = {Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {17},
doi = {10.5772/28725},
url = {https://doi.org/10.5772/28725}
}