@incollection{Phinney12,
author = {Justin R. Serrano and Leslie M. Phinney},
title = {Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {13},
doi = {10.5772/28424},
url = {https://doi.org/10.5772/28424}
}