@incollection{Qiu12,
author = {Wibool Piyawattanametha and Zhen Qiu},
title = {Optical MEMS},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {12},
doi = {10.5772/27612},
url = {https://doi.org/10.5772/27612}
}