@incollection{Rahman12,
author = {Hamood Ur Rahman},
title = {Plasma Based Dry Release of MEMS Devices},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {11},
doi = {10.5772/28420},
url = {https://doi.org/10.5772/28420}
}