@incollection{Marcelli12, author = {Romolo Marcelli and Andrea Lucibello and Giorgio De Angelis and Emanuela Proietti and George Papaioannou and Giancarlo Bartolucci and Flavio Giacomozzi and Benno Margesin}, title = {Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches}, booktitle = {Microelectromechanical Systems and Devices}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Nazmul Islam}, chapter = {10}, doi = {10.5772/29299}, url = {https://doi.org/10.5772/29299} }