@incollection{Petrenko12,
author = {Anatoly Petrenko},
title = {Macromodels of Micro-Electro-Mechanical Systems (MEMS)},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {8},
doi = {10.5772/26812},
url = {https://doi.org/10.5772/26812}
}