@incollection{Sato12,
author = {Bin Tang and Kazuo Sato},
title = {Advanced Surfactant-Modified Wet Anisotropic Etching},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {7},
doi = {10.5772/26901},
url = {https://doi.org/10.5772/26901}
}