@incollection{Guo12,
author = {Tong Guo and Long Ma and Yan Bian},
title = {MEMS Characterization Based on Optical Measuring Methods},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {5},
doi = {10.5772/27524},
url = {https://doi.org/10.5772/27524}
}