@incollection{Nordin12,
author = {Ioana Voiculescu and Anis N. Nordin},
title = {Acoustic Wave Based MEMS Devices, Development and Applications},
booktitle = {Microelectromechanical Systems and Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nazmul Islam},
chapter = {4},
doi = {10.5772/28214},
url = {https://doi.org/10.5772/28214}
}