@incollection{Chen12,
author = {Z. Chen and L.W. Su and J.Y. Shi and X.L. Wang and C.L. Tang and P. Gao},
title = {AFM Application in III-Nitride Materials and Devices},
booktitle = {Atomic Force Microscopy},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Victor Bellitto},
chapter = {9},
doi = {10.5772/37527},
url = {https://doi.org/10.5772/37527}
}