@incollection{Oliveira12, author = {R.R.L. De Oliveira and D.A.C. Albuquerque and T.G.S. Cruz and F.M. Yamaji and F.L. Leite}, title = {Measurement of the Nanoscale Roughness by Atomic Force Microscopy: Basic Principles and Applications}, booktitle = {Atomic Force Microscopy}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Victor Bellitto}, chapter = {7}, doi = {10.5772/37583}, url = {https://doi.org/10.5772/37583} }