@incollection{Kossivas12,
author = {Fotis Kossivas and Charalabos Doumanidis and Andreas Kyprianou},
title = {Thickness Measurement of Photoresist Thin Films Using Interferometry},
booktitle = {Interferometry},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Ivan Padron},
chapter = {18},
doi = {10.5772/34983},
url = {https://doi.org/10.5772/34983}
}