@incollection{Shi12, author = {Feng Shi}, title = {Preparation and Characterization of Dielectric Thin Films by RF Magnetron-Sputtering with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 Ceramic Target}, booktitle = {Scanning Electron Microscopy}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Viacheslav Kazmiruk}, chapter = {37}, doi = {10.5772/35655}, url = {https://doi.org/10.5772/35655} }