@incollection{Kidd12,
author = {Timothy E. Kidd},
title = {Dopant Driven Electron Beam Lithography},
booktitle = {Scanning Electron Microscopy},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Viacheslav Kazmiruk},
chapter = {5},
doi = {10.5772/34872},
url = {https://doi.org/10.5772/34872}
}