@incollection{Homm12,
author = {Gert Homm and Steve Petznick and Torsten Henning and Peter J. Klar},
title = {Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials},
booktitle = {Materials Science and Technology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Sabar D. Hutagalung},
chapter = {3},
doi = {10.5772/33576},
url = {https://doi.org/10.5772/33576}
}