@incollection{Christien12, author = {Frédéric Christien and Edouard Ferchaud and Pawel Nowakowski and Marion Allart}, title = {The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science}, booktitle = {X-Ray Spectroscopy}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Shatendra K. Sharma}, chapter = {6}, doi = {10.5772/28877}, url = {https://doi.org/10.5772/28877} }