@incollection{Asoh12,
author = {Sachiko Ono and Hidetaka Asoh},
title = {Nano/Micro-Patterning of Semiconductors by Site Selective Chemical Etching Using Noble Metals as Catalyst},
booktitle = {Noble Metals},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yen-Hsun Su},
chapter = {11},
doi = {10.5772/34387},
url = {https://doi.org/10.5772/34387}
}