@incollection{Ali12,
author = {Idris Ahmed Ali},
title = {Modeling and Simulation of MEMS Components: Challenges and Possible Solutions},
booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mojtaba Kahrizi},
chapter = {13},
doi = {10.5772/32122},
url = {https://doi.org/10.5772/32122}
}