@incollection{Sarro12,
author = {P.J. French and P.M. Sarro},
title = {Integrated MEMS: Opportunities & Challenges},
booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mojtaba Kahrizi},
chapter = {12},
doi = {10.5772/31493},
url = {https://doi.org/10.5772/31493}
}