@incollection{Schubert12, author = {H.-T. Liu and E. Schubert}, title = {Micro Abrasive-Waterjet Technology}, booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Mojtaba Kahrizi}, chapter = {10}, doi = {10.5772/30409}, url = {https://doi.org/10.5772/30409} }