@incollection{Mendoza-Acevedo12,
author = {Salvador Mendoza-Acevedo and Mario Alfredo Reyes-Barranca and Edgar Norman Vázquez-Acosta and José Antonio Moreno-Cadenas and José Luis González-Vidal},
title = {Release Optimization of Suspended Membranes in MEMS},
booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mojtaba Kahrizi},
chapter = {9},
doi = {10.5772/30909},
url = {https://doi.org/10.5772/30909}
}