@incollection{Eichhorn12,
author = {T. Gietzelt and L. Eichhorn},
title = {Mechanical Micromachining by Drilling, Milling and Slotting},
booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mojtaba Kahrizi},
chapter = {8},
doi = {10.5772/34124},
url = {https://doi.org/10.5772/34124}
}