@incollection{García-Méndez12,
author = {Manuel García-Méndez},
title = {Controlled Growth of C-Oriented AlN Thin Films: Experimental Deposition and Characterization},
booktitle = {Modern Aspects of Bulk Crystal and Thin Film Preparation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nikolai Kolesnikov and Elena Borisenko},
chapter = {12},
doi = {10.5772/28040},
url = {https://doi.org/10.5772/28040}
}