@incollection{Šik12,
author = {Lukáš Válek and Jan Šik},
title = {Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing},
booktitle = {Modern Aspects of Bulk Crystal and Thin Film Preparation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Nikolai Kolesnikov and Elena Borisenko},
chapter = {3},
doi = {10.5772/29816},
url = {https://doi.org/10.5772/29816}
}