@incollection{Shimizu11,
author = {Yuki Shimizu and Takemi Asai and Wei Gao},
title = {Evaluation of Nanometer Cutting Tool Edge for Nanofabrication},
booktitle = {Nanofabrication},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Yoshitake Masuda},
chapter = {11},
doi = {10.5772/28581},
url = {https://doi.org/10.5772/28581}
}