@incollection{Kirihara11,
author = {Soshu Kirihara},
title = {Fabrication of Photonic Crystal Cavities for Terahertz Wave Resonations},
booktitle = {Nanofabrication},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Yoshitake Masuda},
chapter = {10},
doi = {10.5772/31441},
url = {https://doi.org/10.5772/31441}
}