@incollection{Aghabozorg11,
author = {S. Sadegh Hassani and H. R. Aghabozorg},
title = {Nanolithography Study Using Scanning Probe Microscope},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {23},
doi = {10.5772/20881},
url = {https://doi.org/10.5772/20881}
}