@incollection{Dasari11,
author = {Prasad Dasari and Jie Li and Jiangtao Hu and Nigel Smith and
Oleg Kritsun},
title = {Diffraction Based Overlay Metrology for Double Patterning Technologies},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {22},
doi = {10.5772/21970},
url = {https://doi.org/10.5772/21970}
}