@incollection{Meyer11,
author = {Christoph Ludwig and Steffen Meyer},
title = {Double Patterning for Memory ICs},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {21},
doi = {10.5772/23193},
url = {https://doi.org/10.5772/23193}
}