@incollection{Allain11,
author = {J.P. Allain},
title = {Irradiation Effects on EUV Nanolithography Collector Mirrors},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {19},
doi = {10.5772/24316},
url = {https://doi.org/10.5772/24316}
}