@incollection{Amano11,
author = {Sho Amano},
title = {Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {18},
doi = {10.5772/22403},
url = {https://doi.org/10.5772/22403}
}