@incollection{Cheng11,
author = {Guanxiao Cheng and Yong Yang and Chao Hu and Ping Xu and Helun Song and Tingwen Xing and Max Q.-H. Meng},
title = {Emerging Maskless Nanolithography Based on Novel Diffraction Gratings},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {17},
doi = {10.5772/22265},
url = {https://doi.org/10.5772/22265}
}