@incollection{Sugiyama11,
author = {Mitsuhiro Horade and Susumu Sugiyama},
title = {Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {16},
doi = {10.5772/24371},
url = {https://doi.org/10.5772/24371}
}