@incollection{Soppera11,
author = {Olivier Soppera and Ali Dirani and Fabrice Stehlin and Hassan Ridaoui and Arnaud Spangenberg and Fernand Wieder and Vincent Roucoules},
title = {DUV Interferometry for Micro and Nanopatterned Surfaces},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {13},
doi = {10.5772/20896},
url = {https://doi.org/10.5772/20896}
}