@incollection{Cattoni11,
author = {Andrea Cattoni and Jing Chen and Dominique Decanini and Jian Shi and Anne-Marie Haghiri-Gosnet},
title = {Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {7},
doi = {10.5772/21874},
url = {https://doi.org/10.5772/21874}
}