@incollection{Sugihara11,
author = {Makoto Sugihara},
title = {Character Projection Lithography for Application-Specific Integrated Circuits},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {4},
doi = {10.5772/23269},
url = {https://doi.org/10.5772/23269}
}