@incollection{Zhang11,
author = {Jianwu Zhang and Zhongping Wang and Zengming Zhang},
title = {Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {3},
doi = {10.5772/21007},
url = {https://doi.org/10.5772/21007}
}