@incollection{Waid11,
author = {Heinz D. Wanzenboeck and Simon Waid},
title = {Focused Ion Beam Lithography},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {2},
doi = {10.5772/22075},
url = {https://doi.org/10.5772/22075}
}