@incollection{Hosaka11,
author = {Sumio Hosaka},
title = {Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch},
booktitle = {Recent Advances in Nanofabrication Techniques and Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Bo Cui},
chapter = {1},
doi = {10.5772/20711},
url = {https://doi.org/10.5772/20711}
}