@incollection{Chen11,
author = {Eugene Y. Ngai and Jenq-Renn Chen},
title = {Gas Safety for TFT-LCD Manufacturing},
booktitle = {Features of Liquid Crystal Display Materials and Processes},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Natalia V. Kamanina},
chapter = {8},
doi = {10.5772/29226},
url = {https://doi.org/10.5772/29226}
}